Vacuum coating machine leak detection operation
1, the helium mass spectrometer leak detector HLT 560 connected to the front of the... pumps on the leak detection.
2, start, leak detector, leak detector began to draw the gases in the sealed cavity, and at the same time start the coating equipment pump group.
3, in the internal of vacuum coating machine down to a certain amount of time, such as below the 0.5 mbar, helium gas gush in doubt there is leakage, or move to the part of the check standard maintenance. At this moment need someone to observe the leakage rate of leak detector of the indicated value change. When leakage rate increase or severe leakage rate values change over time, points out that funnelled location in time, and marking.
4, all suspects testing is complete, close the leak detector, stop coating machine pumps and open the coating machine, will detect the funnelled processing (such as replacement of sealing ring, cleaning, etc.). After processing is completed, according to Syria step before check it again, until all funnelled cleared, leak detection process is complete.
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