The use of glass coating machine
A, the operation of electric control cabinet1. Open water pump, air source.
2. Open the total power.
3. Maintain open pump, vacuum gauge, vacuum gauge files V1 position, wait for after its value is less than 10, then into the next operation. Takes about 5 minutes.
4. Open mechanical pump, to pump, turbomolecular pump power supply, start, vacuum gauge switch in position to V2, smoke until less than 2, about 20 minutes.
5. Observe the turbo molecular pump reading after 250, take out, to be opened before the machine and high valve to continue pumping air into vacuum state, vacuum reaches a certain degree to drive on the right side of the high vacuum header, observe the vacuum degree. Vacuum arrived at 2 x 10-3 after to open gun power supply.
Second, the electron gun power operation
1. The total power supply.
2. At the same time open Ⅰ gun control and gun control Ⅱ power: according to the electron gun control Ⅰ power supply, delay switch, delay, power and to protect the light, three minutes after the time delay and protect the lights went out, if the back door is not closed or malfunction with the current relay, protect will normally on.
3. High pressure, high pressure will reach more than 10 kv, adjust the beam to about 200 ma, screen grid for 20 v / 100 ma, the filament current is 1.2 A, deflection current oscillation between 1 ~ 1.7.
Third, shutdown sequence
1. Close the high vacuum header, molecular pump.
2. Stay molecular pump to 50, in turn off valve, former level, high mechanical pump, this time takes about 40 minutes.
3. Below 50, to maintain the pump.
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Vacuum Clamps