Vacuum coating machine film uniformity concept

Vacuum coating machine film uniformity concept

1. The thickness uniformity, also can understand as roughness, on the standard of optical thin film to watch (that is 1/10 of a wavelength as a unit, which is about 100 a), the uniformity of vacuum coating machine has been pretty good, easy to manipulate roughness in 1/10 of the visible light wavelength range, that is said about the optical properties of thin film, vacuum coating not any way. But if standard is refers to the atomic layer on the uniformity, which is said to complete 10 a and 1 a the appearance of smooth, detailed control elements detailed explanations are given here is on the basis of different coating.
Uniformity on 2. Chemical composition: that is said in the film, compound of atomic group branch occurs as a result of the standard is too small and very simple homogeneous characteristics of SiTiO3 film, if coating process is not scientific, so not SiTiO3 practice appearance of components, and is likely to be other share, membrane plating membrane is not want chemical composition, it is also a vacuum coating place of skill levels. The detailed elements are given below.
3. The uniformity of the lattice degree of order: this resolution the film is a single crystal, polycrystalline, amorphous, and is the hot issue in vacuum coating skills, detail see below.
Primary classification, there are two big kinds: transpiration accumulated mass of coating and sputtering coating, contains many varieties in detail, include vacuum ion transpiration, magnetron sputtering, MBE molecular beam epitaxy, sol gel method and so on.